Name of Entity

Jurisdiction of Incorporation or Organization

Cimetrix Incorporated

Nevada

Cimetrix International, Inc.

Nevada

Cimetrix Software (Shanghai) Co., Ltd.

China

PDF Solutions Asia Services, Inc.

Delaware

PDF Solutions Canada Ltd.

Canada

PDF Solutions GmbH

Germany

PDF Solutions International Services, Inc.

Delaware

PDF Solutions Japan KK

Japan

PDF Solutions Pacific Services, Inc.

Delaware

PDF Solutions SARL

France

PDF Solutions Italy S.r.l.

Italy

PDF Solutions Semiconductor Technology (Korea) Limited

Korea

PDF Solutions Semiconductor Technology (Shanghai) Co. Ltd.

China

PDF Solutions Semiconductor Technology Taiwan Ltd.

Taiwan